{"id":44,"date":"2025-09-24T09:47:58","date_gmt":"2025-09-24T02:47:58","guid":{"rendered":"http:\/\/trungpro.com.vn\/wordpress\/?p=44"},"modified":"2025-09-24T09:47:58","modified_gmt":"2025-09-24T02:47:58","slug":"may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai","status":"publish","type":"post","link":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/","title":{"rendered":"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i"},"content":{"rendered":"\n<p><strong>1. M\u00e1y quang kh\u1eafc l\u00e0 g\u00ec?<\/strong><\/p>\n\n\n\n<p>M\u00e1y quang kh\u1eafc (Photolithography machine) l\u00e0 thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t vi m\u1ea1ch b\u00e1n d\u1eabn. C\u00f4ng ngh\u1ec7 n\u00e0y s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng \u0111\u1ec3 in c\u00e1c h\u1ecda ti\u1ebft si\u00eau nh\u1ecf l\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer silicon, t\u1eeb \u0111\u00f3 t\u1ea1o ra h\u00e0ng t\u1ef7 transistor trong m\u1ed9t con chip.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"1024\" src=\"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp\" alt=\"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i\" class=\"wp-image-45\" srcset=\"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp 1024w, https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac-300x300.webp 300w, https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac-150x150.webp 150w, https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac-768x768.webp 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><figcaption class=\"wp-element-caption\"><em>M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i<\/em><\/figcaption><\/figure>\n\n\n\n<p>C\u00f3 th\u1ec3 n\u00f3i, m\u00e1y quang kh\u1eafc ch\u00ednh l\u00e0 \u201cc\u1ed7 m\u00e1y in \u1ea5n c\u1ee7a th\u1eddi \u0111\u1ea1i s\u1ed1\u201d, quy\u1ebft \u0111\u1ecbnh tr\u1ef1c ti\u1ebfp \u0111\u1ebfn hi\u1ec7u n\u0103ng, k\u00edch th\u01b0\u1edbc v\u00e0 kh\u1ea3 n\u0103ng s\u1ea3n xu\u1ea5t chip b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p><strong>2. V\u00ec sao m\u00e1y quang kh\u1eafc \u0111\u01b0\u1ee3c coi l\u00e0 \u0111\u1ec9nh cao c\u00f4ng ngh\u1ec7?<\/strong><\/p>\n\n\n\n<p><strong>2.1 \u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c h\u1ea1n<\/strong><\/p>\n\n\n\n<p>M\u00e1y quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i c\u00f3 th\u1ec3 kh\u1eafc c\u00e1c chi ti\u1ebft \u1edf k\u00edch th\u01b0\u1edbc nanomet (1\/1.000.000.000 m\u00e9t). \u0110\u00e2y l\u00e0 gi\u1edbi h\u1ea1n g\u1ea7n nh\u01b0 ti\u1ec7m c\u1eadn v\u1eadt l\u00fd, \u0111\u00f2i h\u1ecfi k\u1ef9 thu\u1eadt quang h\u1ecdc v\u00e0 c\u01a1 kh\u00ed si\u00eau tinh vi.<\/p>\n\n\n\n<p><strong>2.2 C\u00f4ng ngh\u1ec7 \u00e1nh s\u00e1ng EUV<\/strong><\/p>\n\n\n\n<p>Th\u1ebf h\u1ec7 m\u1edbi nh\u1ea5t l\u00e0 m\u00e1y quang kh\u1eafc EUV (Extreme Ultraviolet). N\u00f3 s\u1eed d\u1ee5ng tia c\u1ef1c t\u00edm c\u00f3 b\u01b0\u1edbc s\u00f3ng 13,5nm, cho ph\u00e9p s\u1ea3n xu\u1ea5t chip 3nm v\u00e0 ti\u1ebfn t\u1edbi 2nm trong t\u01b0\u01a1ng lai. EUV hi\u1ec7n ch\u1ec9 c\u00f3 duy nh\u1ea5t h\u00e3ng ASML (H\u00e0 Lan) l\u00e0m ch\u1ee7.<\/p>\n\n\n\n<p><strong>2.3 S\u1ef1 k\u1ebft h\u1ee3p c\u1ee7a h\u00e0ng v\u1ea1n c\u00f4ng ngh\u1ec7<\/strong><\/p>\n\n\n\n<p>M\u1ed9t chi\u1ebfc m\u00e1y quang kh\u1eafc EUV n\u1eb7ng 180 t\u1ea5n, g\u1ed3m h\u01a1n 100.000 linh ki\u1ec7n, s\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa quang h\u1ecdc, laser, ch\u00e2n kh\u00f4ng, c\u01a1 kh\u00ed ch\u00ednh x\u00e1c v\u00e0 si\u00eau v\u1eadt li\u1ec7u. Gi\u00e1 m\u1ed9t m\u00e1y c\u00f3 th\u1ec3 v\u01b0\u1ee3t 200 tri\u1ec7u USD, \u0111\u1eaft h\u01a1n c\u1ea3 m\u1ed9t chi\u1ebfc m\u00e1y bay.<\/p>\n\n\n\n<p><strong>3. Vai tr\u00f2 c\u1ee7a m\u00e1y quang kh\u1eafc trong ng\u00e0nh b\u00e1n d\u1eabn<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Tr\u00e1i tim c\u1ee7a s\u1ea3n xu\u1ea5t chip: Kh\u00f4ng c\u00f3 m\u00e1y quang kh\u1eafc, s\u1ebd kh\u00f4ng th\u1ec3 t\u1ea1o ra chip x\u1eed l\u00fd, b\u1ed9 nh\u1edb hay c\u1ea3m bi\u1ebfn h\u00ecnh \u1ea3nh.<\/li>\n\n\n\n<li>\u1ea2nh h\u01b0\u1edfng \u0111\u1ebfn c\u00f4ng ngh\u1ec7 to\u00e0n c\u1ea7u: Smartphone, m\u00e1y t\u00ednh, \u00f4 t\u00f4 \u0111i\u1ec7n, tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o, si\u00eau m\u00e1y t\u00ednh\u2026 \u0111\u1ec1u ph\u1ee5 thu\u1ed9c v\u00e0o con chip \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1edfi c\u00f4ng ngh\u1ec7 quang kh\u1eafc.<\/li>\n\n\n\n<li>Quy\u1ec1n l\u1ef1c c\u00f4ng ngh\u1ec7: Qu\u1ed1c gia n\u00e0o ki\u1ec3m so\u00e1t \u0111\u01b0\u1ee3c m\u00e1y quang kh\u1eafc, qu\u1ed1c gia \u0111\u00f3 n\u1eafm trong tay l\u1ee3i th\u1ebf chi\u1ebfn l\u01b0\u1ee3c v\u1ec1 c\u00f4ng ngh\u1ec7, qu\u00e2n s\u1ef1 v\u00e0 kinh t\u1ebf.<\/li>\n<\/ul>\n\n\n\n<p><strong>4. Nh\u1eefng \u201c\u00f4ng l\u1edbn\u201d \u0111\u1ee9ng sau m\u00e1y quang kh\u1eafc<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>ASML (H\u00e0 Lan): Nh\u00e0 s\u1ea3n xu\u1ea5t duy nh\u1ea5t m\u00e1y EUV tr\u00ean th\u1ebf gi\u1edbi.<\/li>\n\n\n\n<li>Zeiss (\u0110\u1ee9c): Cung c\u1ea5p h\u1ec7 th\u1ed1ng th\u1ea5u k\u00ednh ch\u00ednh x\u00e1c nh\u1ea5t h\u00e0nh tinh.<\/li>\n\n\n\n<li>Cymer (M\u1ef9): Cung c\u1ea5p ngu\u1ed3n s\u00e1ng laser cho m\u00e1y EUV.<\/li>\n<\/ul>\n\n\n\n<p>\u0110\u00e2y l\u00e0 chu\u1ed7i li\u00ean minh c\u00f4ng ngh\u1ec7 kh\u1ed5ng l\u1ed3, n\u01a1i m\u00e0 m\u1ed7i chi ti\u1ebft \u0111\u1ec1u \u1edf m\u1ee9c \u0111\u1ec9nh cao nh\u00e2n lo\u1ea1i.<\/p>\n\n\n\n<p><strong>5. Th\u00e1ch th\u1ee9c v\u00e0 t\u01b0\u01a1ng lai c\u1ee7a m\u00e1y quang kh\u1eafc<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Chi ph\u00ed c\u1ef1c cao: Kh\u00f4ng ph\u1ea3i qu\u1ed1c gia n\u00e0o c\u0169ng c\u00f3 kh\u1ea3 n\u0103ng mua v\u00e0 v\u1eadn h\u00e0nh.<\/li>\n\n\n\n<li>Ph\u1ee5 thu\u1ed9c chu\u1ed7i cung \u1ee9ng: M\u1ed9t m\u1eaft x\u00edch gi\u00e1n \u0111o\u1ea1n c\u00f3 th\u1ec3 l\u00e0m c\u1ea3 ng\u00e0nh b\u00e1n d\u1eabn lao \u0111ao.<\/li>\n\n\n\n<li>T\u01b0\u01a1ng lai 2nm v\u00e0 xa h\u01a1n: M\u00e1y quang kh\u1eafc EUV th\u1ebf h\u1ec7 m\u1edbi s\u1ebd ti\u1ebfp t\u1ee5c m\u1edf \u0111\u01b0\u1eddng cho nh\u1eefng con chip m\u1ea1nh m\u1ebd h\u01a1n, ph\u1ee5c v\u1ee5 tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o, v\u0169 tr\u1ee5, si\u00eau m\u00e1y t\u00ednh l\u01b0\u1ee3ng t\u1eed.<\/li>\n<\/ul>\n\n\n\n<p><strong>6. K\u1ebft lu\u1eadn<\/strong><\/p>\n\n\n\n<p>M\u00e1y quang kh\u1eafc kh\u00f4ng ch\u1ec9 l\u00e0 m\u1ed9t c\u00f4ng c\u1ee5 s\u1ea3n xu\u1ea5t chip, m\u00e0 c\u00f2n l\u00e0 bi\u1ec3u t\u01b0\u1ee3ng c\u1ee7a \u0111\u1ec9nh cao c\u00f4ng ngh\u1ec7 nh\u00e2n lo\u1ea1i. N\u00f3 k\u1ebft tinh tr\u00ed tu\u1ec7 c\u1ee7a h\u00e0ng ch\u1ee5c ngh\u00ecn nh\u00e0 khoa h\u1ecdc, k\u1ef9 s\u01b0 tr\u00ean to\u00e0n c\u1ea7u. Trong k\u1ef7 nguy\u00ean s\u1ed1, m\u00e1y quang kh\u1eafc ch\u00ednh l\u00e0 \u201cch\u00eca kh\u00f3a\u201d \u0111\u1ec3 m\u1edf ra t\u01b0\u01a1ng lai c\u00f4ng ngh\u1ec7, n\u01a1i m\u00e0 m\u1ed7i transistor nh\u1ecf b\u00e9 l\u1ea1i c\u00f3 th\u1ec3 thay \u0111\u1ed5i c\u1ea3 th\u1ebf gi\u1edbi.<\/p>\n\n\n\n<p><\/p>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>M\u00e1y quang kh\u1eafc (Photolithography machine) l\u00e0 thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t vi m\u1ea1ch b\u00e1n d\u1eabn. C\u00f4ng ngh\u1ec7 n\u00e0y s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng \u0111\u1ec3 in c\u00e1c h\u1ecda ti\u1ebft si\u00eau nh\u1ecf l\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer silicon, t\u1eeb \u0111\u00f3 t\u1ea1o ra h\u00e0ng t\u1ef7 transistor trong m\u1ed9t con chip.<\/p>\n","protected":false},"author":1,"featured_media":45,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[20,19],"class_list":["post-44","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-khoa-hoc-cong-nghe","tag-dinh-cao-cong-nghe","tag-may-quang-khac"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.4 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i - TrungPro.com.vn<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/\" \/>\n<meta property=\"og:locale\" content=\"vi_VN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i - TrungPro.com.vn\" \/>\n<meta property=\"og:description\" content=\"M\u00e1y quang kh\u1eafc (Photolithography machine) l\u00e0 thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t vi m\u1ea1ch b\u00e1n d\u1eabn. C\u00f4ng ngh\u1ec7 n\u00e0y s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng \u0111\u1ec3 in c\u00e1c h\u1ecda ti\u1ebft si\u00eau nh\u1ecf l\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer silicon, t\u1eeb \u0111\u00f3 t\u1ea1o ra h\u00e0ng t\u1ef7 transistor trong m\u1ed9t con chip.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/\" \/>\n<meta property=\"og:site_name\" content=\"TrungPro.com.vn\" \/>\n<meta property=\"article:published_time\" content=\"2025-09-24T02:47:58+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp\" \/>\n\t<meta property=\"og:image:width\" content=\"1024\" \/>\n\t<meta property=\"og:image:height\" content=\"1024\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/webp\" \/>\n<meta name=\"author\" content=\"trungpro\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u0110\u01b0\u1ee3c vi\u1ebft b\u1edfi\" \/>\n\t<meta name=\"twitter:data1\" content=\"trungpro\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u01af\u1edbc t\u00ednh th\u1eddi gian \u0111\u1ecdc\" \/>\n\t<meta name=\"twitter:data2\" content=\"4 ph\u00fat\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/\"},\"author\":{\"name\":\"trungpro\",\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/#\\\/schema\\\/person\\\/75d36a033f3f8e0b4c7783718b687d97\"},\"headline\":\"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i\",\"datePublished\":\"2025-09-24T02:47:58+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/\"},\"wordCount\":886,\"commentCount\":0,\"image\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/wp-content\\\/uploads\\\/2025\\\/09\\\/May-quang-khac.webp\",\"keywords\":[\"\u0110\u1ec9nh cao c\u00f4ng ngh\u1ec7\",\"M\u00e1y quang kh\u1eafc\"],\"articleSection\":[\"Khoa h\u1ecdc C\u00f4ng ngh\u1ec7\"],\"inLanguage\":\"vi\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/\",\"url\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/\",\"name\":\"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i - TrungPro.com.vn\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/wp-content\\\/uploads\\\/2025\\\/09\\\/May-quang-khac.webp\",\"datePublished\":\"2025-09-24T02:47:58+00:00\",\"author\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/#\\\/schema\\\/person\\\/75d36a033f3f8e0b4c7783718b687d97\"},\"breadcrumb\":{\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#breadcrumb\"},\"inLanguage\":\"vi\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"vi\",\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#primaryimage\",\"url\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/wp-content\\\/uploads\\\/2025\\\/09\\\/May-quang-khac.webp\",\"contentUrl\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/wp-content\\\/uploads\\\/2025\\\/09\\\/May-quang-khac.webp\",\"width\":1024,\"height\":1024},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Trang ch\u1ee7\",\"item\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/#website\",\"url\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/\",\"name\":\"TrungPro.com.vn\",\"description\":\"C\u00f4ng Ngh\u1ec7, Gi\u1ea3i Ph\u00e1p S\u1ed1 &amp; Tin T\u1ee9c M\u1edbi Nh\u1ea5t\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"vi\"},{\"@type\":\"Person\",\"@id\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/#\\\/schema\\\/person\\\/75d36a033f3f8e0b4c7783718b687d97\",\"name\":\"trungpro\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"vi\",\"@id\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/c5b103746bc65ce3b1e2e5758087858af4d0288955d355463b2064d3291f64bf?s=96&d=mm&r=g\",\"url\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/c5b103746bc65ce3b1e2e5758087858af4d0288955d355463b2064d3291f64bf?s=96&d=mm&r=g\",\"contentUrl\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/c5b103746bc65ce3b1e2e5758087858af4d0288955d355463b2064d3291f64bf?s=96&d=mm&r=g\",\"caption\":\"trungpro\"},\"sameAs\":[\"http:\\\/\\\/trungpro.com.vn\\\/wordpress\"],\"url\":\"https:\\\/\\\/trungpro.com.vn\\\/wordpress\\\/author\\\/trungpro\\\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i - TrungPro.com.vn","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/","og_locale":"vi_VN","og_type":"article","og_title":"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i - TrungPro.com.vn","og_description":"M\u00e1y quang kh\u1eafc (Photolithography machine) l\u00e0 thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t vi m\u1ea1ch b\u00e1n d\u1eabn. C\u00f4ng ngh\u1ec7 n\u00e0y s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng \u0111\u1ec3 in c\u00e1c h\u1ecda ti\u1ebft si\u00eau nh\u1ecf l\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer silicon, t\u1eeb \u0111\u00f3 t\u1ea1o ra h\u00e0ng t\u1ef7 transistor trong m\u1ed9t con chip.","og_url":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/","og_site_name":"TrungPro.com.vn","article_published_time":"2025-09-24T02:47:58+00:00","og_image":[{"width":1024,"height":1024,"url":"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp","type":"image\/webp"}],"author":"trungpro","twitter_card":"summary_large_image","twitter_misc":{"\u0110\u01b0\u1ee3c vi\u1ebft b\u1edfi":"trungpro","\u01af\u1edbc t\u00ednh th\u1eddi gian \u0111\u1ecdc":"4 ph\u00fat"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#article","isPartOf":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/"},"author":{"name":"trungpro","@id":"https:\/\/trungpro.com.vn\/wordpress\/#\/schema\/person\/75d36a033f3f8e0b4c7783718b687d97"},"headline":"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i","datePublished":"2025-09-24T02:47:58+00:00","mainEntityOfPage":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/"},"wordCount":886,"commentCount":0,"image":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#primaryimage"},"thumbnailUrl":"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp","keywords":["\u0110\u1ec9nh cao c\u00f4ng ngh\u1ec7","M\u00e1y quang kh\u1eafc"],"articleSection":["Khoa h\u1ecdc C\u00f4ng ngh\u1ec7"],"inLanguage":"vi","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/","url":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/","name":"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i - TrungPro.com.vn","isPartOf":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/#website"},"primaryImageOfPage":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#primaryimage"},"image":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#primaryimage"},"thumbnailUrl":"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp","datePublished":"2025-09-24T02:47:58+00:00","author":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/#\/schema\/person\/75d36a033f3f8e0b4c7783718b687d97"},"breadcrumb":{"@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#breadcrumb"},"inLanguage":"vi","potentialAction":[{"@type":"ReadAction","target":["https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/"]}]},{"@type":"ImageObject","inLanguage":"vi","@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#primaryimage","url":"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp","contentUrl":"https:\/\/trungpro.com.vn\/wordpress\/wp-content\/uploads\/2025\/09\/May-quang-khac.webp","width":1024,"height":1024},{"@type":"BreadcrumbList","@id":"https:\/\/trungpro.com.vn\/wordpress\/may-quang-khac-dinh-cao-cong-nghe-cua-nhan-loai\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Trang ch\u1ee7","item":"https:\/\/trungpro.com.vn\/wordpress\/"},{"@type":"ListItem","position":2,"name":"M\u00e1y Quang Kh\u1eafc \u2013 \u0110\u1ec9nh Cao C\u00f4ng Ngh\u1ec7 C\u1ee7a Nh\u00e2n Lo\u1ea1i"}]},{"@type":"WebSite","@id":"https:\/\/trungpro.com.vn\/wordpress\/#website","url":"https:\/\/trungpro.com.vn\/wordpress\/","name":"TrungPro.com.vn","description":"C\u00f4ng Ngh\u1ec7, Gi\u1ea3i Ph\u00e1p S\u1ed1 &amp; Tin T\u1ee9c M\u1edbi Nh\u1ea5t","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/trungpro.com.vn\/wordpress\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"vi"},{"@type":"Person","@id":"https:\/\/trungpro.com.vn\/wordpress\/#\/schema\/person\/75d36a033f3f8e0b4c7783718b687d97","name":"trungpro","image":{"@type":"ImageObject","inLanguage":"vi","@id":"https:\/\/secure.gravatar.com\/avatar\/c5b103746bc65ce3b1e2e5758087858af4d0288955d355463b2064d3291f64bf?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/c5b103746bc65ce3b1e2e5758087858af4d0288955d355463b2064d3291f64bf?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/c5b103746bc65ce3b1e2e5758087858af4d0288955d355463b2064d3291f64bf?s=96&d=mm&r=g","caption":"trungpro"},"sameAs":["http:\/\/trungpro.com.vn\/wordpress"],"url":"https:\/\/trungpro.com.vn\/wordpress\/author\/trungpro\/"}]}},"_links":{"self":[{"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/posts\/44","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/comments?post=44"}],"version-history":[{"count":1,"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/posts\/44\/revisions"}],"predecessor-version":[{"id":46,"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/posts\/44\/revisions\/46"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/media\/45"}],"wp:attachment":[{"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/media?parent=44"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/categories?post=44"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/trungpro.com.vn\/wordpress\/wp-json\/wp\/v2\/tags?post=44"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}